Microscopy

• Optical Microscopes

  • Optical Microscope 1: Zeiss
  • Optical Microscope 2: Olympus
  • Optical Microscope 3: Olympus

• Scanning Electron Microscope (SEM)

  • SEM: TESCAN VEGA3 XMH

Surface and Film Characterization

• White Light Interferometer: Wyco Optical Profiler: Provides 3D surface profiling with nanometer precision using white light interferometry.
• Stylus Profilometer: DEKTAK-XT: Measures surface roughness and topography with high accuracy.

Electrical and Material Properties

• Sheet Resistance Measurement: Measures the electrical resistance of thin films, important for conductivity analysis.
• Reflectometer: Nanospec: Measures thin film thickness and optical properties based on reflectance.

Test and Analysis

• Probe Station: Everbeing C6: A platform for electrical testing of individual devices on semiconductor wafers.