UV Lithography聽

• EVG620 UV Mask Aligner
• SUSS MA/BA 6 Gen4

Direct Write

• Dilases 650 UV Laser Maskless Direct Write
• TESCAN MIRA3 XMH
• Heidenburg-Nanofrazor Explore

Coating Equipment

• EVG101 Spray Coater
• Laurell Technology
• Laurell Technology with Edge Bead Removal (EBR)
• Laminator

Oven and Hotplate

• YES Priming Oven
• AMS200 Hot Plate