Physical Vapor Deposition

• E-beam Evaporator

  • BJD 1800 

    Materials: Ti, Ag, Al, Ni, Cr, Au....

  • Angstrom Engineering-Nexdep 

    Materials: Al, Ge, Cu, Pt, Ti, Cr, Ni, Au...

• DC and RF Sputter

  • Denton Explore 

    Materials: SiOâ‚‚, SiN, ITO, Ti, Cr, Mo, Zr, Au, Al, SiC...

  • Angstrom Engineering-Amode 

    Materials: SiOâ‚‚, SiN, ITO, Ti, Cr, Mo, Zr, Au, Al, SiC...

Chemical Vapor Deposition

• VECCO Fiji G2 (ALD)

  Materials: TiOâ‚‚, Al₂O₃, SiOâ‚‚, HfOâ‚‚

• AM5000 (PECVD)

  Materials: SiOâ‚‚, Si₃N₄

• SCS 200 (Parylene Coater)

    Material: Parylene C, N