Vue d'ensemble
G茅nie m茅canique : Introduction to microelectromechanical systems (MEMS). Micromachining techniques (thin-film deposition; lithography; etching; bonding). Microscale mechanical behaviour (deformation and fracture; residual stresses; adhesion; experimental techniques). Materials- and process-selection. Process integration. Design of microdevice components to meet specified performance and reliability targets using realistic manufacturing processes.
Terms: Automne 2009
Instructors: Vengallatore, Srikar (Fall)
- (3-0-6)
- Prerequisite: Instructor's permission.